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Synthesis of Diamond Like Carbon Films Deposited by the Ionization Vapor Method and Development of its Semiconductive Devices Fabricated by the Focused Ga-ion Beam Implantation

The transactions of the Institute of Electrical Engineers of Japan.A Pub Date : 2017-01-01 DOI:10.1541/IEEJFMS.137.584
S. Kurumi, Yusuke Takahara, T. Ohno, K. Matsuda, Kaoru Suzuki
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The transactions of the Institute of Electrical Engineers of Japan.A
The transactions of the Institute of Electrical Engineers of Japan.A
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