Получение и свойства мезопористых пленок MoS-=SUB=-2-=/SUB=-

Физика и техника полупроводников Pub Date : 2022-01-01 DOI:10.21883/ftp.2022.12.54509.4129

А. Б. Логинов, С.Н. Бокова-Сирош, П.В. Федотов, И. В. Сапков, Д. Н. Хмеленин, Р. Р. Исмагилов, Е. Д. Образцова, Б.А. Логинов, А.Н. Образцов

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Abstract

Molybdenum disulfide is a crystalline material which attracts considerable attention due to explicit two-dimensional cha- racter of its electronic properties. To obtain MoS2 films thermally evaporated molybdenum and gaseous H2S were used as precursors in this work. As a result of chemical reaction of these precursors films consisting of flake-like of nanometer thickness assembled from parallel atomic layers with predominantly perpendicular (with respect to substrate surface) orientation were deposited on the surface of Si substrate. In this work we investigate the dependence of film morphology on deposition time, substrate temperature and concentration of precursors in gaseous phase. Presence of mono- and bi-layered structures in the film was revealed using Raman spectroscopy and electron microscopy. Dependence of photoluminescence properties on size of crystallites in produced films was also studied.

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二硫化钼是一种晶体材料，由于其电子性质具有明显的二维特征而备受关注。采用热蒸发钼和气态H2S作为前驱体制备MoS2薄膜。由于这些前驱体的化学反应，在Si衬底表面沉积了由平行原子层组装而成的纳米厚度片状薄膜，其取向主要垂直于衬底表面。在这项工作中，我们研究了沉积时间、衬底温度和气相前驱体浓度对薄膜形貌的影响。利用曼光谱和电子显微镜分析了薄膜中单层和双层结构的存在。本文还研究了薄膜中微晶尺寸对光致发光性能的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Физика и техника полупроводников

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