Research on the high precision automatic measurement system for diameter of microdrill

T. Xiaohong, Xiong Guoliang
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Abstract

Aiming at requirement of measuring the microdrill put forward by the domestic enterprise, thorough investigation for the previous measurement methods of the microdrill is carried on in this paper. On the basis of it, the CCD-aperture diffraction method of measuring the microdrill diameter is proposed, and the corresponding automatic measurement system is designed. The research can establish some theoretical foundation for the design of the instrument for measuring microdrill diameter in future.
微钻直径高精度自动测量系统的研究
针对国内企业对微钻的测量要求,对以往的微钻测量方法进行了深入的研究。在此基础上,提出了ccd孔径衍射法测量微钻直径,并设计了相应的自动测量系统。研究结果可为今后微钻直径测量仪器的设计奠定一定的理论基础。
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