Studies and Research on Obtaining Multifunctional Thin Films by Magnetron-Assisted PVD Process

S. Boiciuc
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引用次数: 0

Abstract

The paper aims to obtain thin films of nickel and zinc through the magnetron-assisted spraying process and their characterization from a structural point of view, of electrical, optical properties and corrosion resistance. It was found that as the intensity and discharge power increase, changes occur in the structure and properties of the deposited films.
磁控管辅助PVD工艺制备多功能薄膜的研究
本文旨在通过磁控管辅助喷涂工艺获得镍和锌薄膜,并从结构、电学、光学性能和耐腐蚀性的角度对其进行表征。结果表明,随着放电强度和放电功率的增加,沉积膜的结构和性能发生了变化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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25
审稿时长
8 weeks
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