STRUCTURAL PROPERTIES OF PZT THIN FILMS: THE EFFECTS OF HEAT TREATMENT

IF 0.1 0 LITERATURE

Sic Pub Date : 2015-01-01 DOI:10.5151/PHYPRO-SIC100-021

E. C. Lima, E. Araújo

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Abstract

The effects of heat-treatment conditions on crystallographic orientation and phase transformations were studied on lead zirconate titanate Pb(Zr0.50Ti0.50)O3 (PZT) thin films. Films deposited on platinum with a chemical solution can exhibit 111 or 100 texture, however, there is no consensus about the mechanisms responsible for texture during heat treatment processes. The heat treatment affects directly the densification of the film as well as the residual stress developed. In addition, the formation of impurities as a pyrochlore phase (Pb2(Zr1-xTix)2O6) was noticed by several authors. In this work, the evolution of phases and trends of texture were characterized for different temperatures of pyrolysis in PZT thin films using X-ray diffraction. The perovskite phase coexists with the pyLicearochlore phase to the film pyrolyzed from 350 °C to 450 °C. However, the films produced at low temperature pyrolysis showed only the presence of the perovskite phase. The Rietveld method was used to quantify the percentage of each phase as a function of temperature of pyrolysis. The microstrain and the residual stress was evaluated to explain the mechanisms responsible for texture and phase transformations in PZT films. STRUCTURAL PROPERTIES OF PZT THIN FILMS: THE EFFECTS OF HEAT TREATMENT

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PZT薄膜的结构性能:热处理的影响

研究了热处理条件对锆钛酸铅(Pb(Zr0.50Ti0.50)O3 (PZT)薄膜晶体取向和相变的影响。用化学溶液沉积在铂上的薄膜可以呈现111或100织构，然而，在热处理过程中对织构的机制没有共识。热处理直接影响薄膜的致密性和残余应力的产生。此外，一些作者注意到杂质以焦绿盐相(Pb2(Zr1-xTix)2O6)的形式形成。本文利用x射线衍射对PZT薄膜在不同热解温度下的物相演变和织构变化趋势进行了表征。在350 ~ 450℃的温度下，钙钛矿相与钙钛矿相共存。而低温热解制备的薄膜只存在钙钛矿相。Rietveld法用于量化各相的百分比作为热解温度的函数。通过分析微应变和残余应力来解释PZT薄膜织构和相变的机理。PZT薄膜的结构性能:热处理的影响

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