Silicon micromachined microlens array for THz antenna

Abstract

We have developed a 5 × 5 silicon microlens array using silicon micromachining technique for silicon based THz antenna array. The feature of silicon micromachining technique enables one to microfabricate unlimited number of microlens arrays at one time with good uniformity on a silicon wafer. This technique will resolve one of the key issues in building THz camera which is to integrate antennas in detector array.