Self-Formation of Dual Glassy-Crystalline Structure in Magnetron Sputtered W–Zr Films

P. Zeman, S. Haviar, M. Červená
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引用次数: 4

Abstract

Abstract Self-formation of a unique dual glassy-crystalline structure in binary W–Zr system was observed for a film with 28 at.% Zr prepared by magnetron co-sputtering. The film is composed of conical columnar domains of α-W(Zr) solid solution structure surrounded by featureless areas corresponding to a W–Zr metallic glass. The conical domains have their axes perpendicular to the film surface. Most of the domains have the apex at or close to the substrate surface, which corresponds to the point of primary nucleation. The surface ratio of glassy and crystalline phase (bases of the cones) is dependent on the film thickness. The dual structure is prepared in a very narrow window of the elemental composition. We suppose that the specific elemental composition and the diffusivity or mobility of sputtered adatoms are crucial for the self-formation of the dual structure.
磁控溅射W-Zr薄膜中双玻璃晶结构的自形成
摘要:在28 at的二元W-Zr体系中,观察到一种独特的双玻璃晶结构自形成。磁控共溅射制备% Zr。该薄膜由α-W(Zr)固溶体结构的圆锥形柱状畴组成,其周围无特征区与W-Zr金属玻璃相对应。圆锥域的轴垂直于薄膜表面。大多数结构域的顶端在底物表面或靠近底物表面,这与初成核点相对应。玻璃相和结晶相(锥体的基底)的表面比例取决于薄膜的厚度。二元结构是在元素组成的一个非常窄的窗口中制备的。我们认为,特定的元素组成和溅射原子的扩散率或迁移率对二元结构的自形成至关重要。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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