BAW microwave temperature sensor

Abstract

The paper studies the possibility of using microwave high overtone bulk acoustic wave resonators (HBAR) in temperature sensors in liquids. The shear 430 MHz BAW are excited in the resonator structure providing high temperature sensitivity and relatively low harmful mechanical sensitivity of sensor on ambient liquid media. The new technical suggestion is that the resonator is acoustically isolated and protected from the mechanical influence of ambient media by multilayer Bragg quarter-wavelength thin film reflectors.