{"title":"Visualizing acoustic displacements of capacitive micromachined transducers using an interferometric microscope","authors":"L. Davis, D. Billson, D. Hutchins, R. A. Noble","doi":"10.1121/1.1851391","DOIUrl":null,"url":null,"abstract":"The modification of a commercial Wyko optical profilometer to operate stroboscopically has been demonstrated. This has then been applied to the characterization of a micro-mechanical device subjected to high frequency periodic excitation. It is demonstrated that displacement amplitudes can be mapped across the surface of a micromachined transducer at ultrasonic frequencies.","PeriodicalId":87384,"journal":{"name":"Acoustics research letters online : ARLO","volume":"26 1","pages":"75-79"},"PeriodicalIF":0.0000,"publicationDate":"2005-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"18","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Acoustics research letters online : ARLO","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1121/1.1851391","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 18
Abstract
The modification of a commercial Wyko optical profilometer to operate stroboscopically has been demonstrated. This has then been applied to the characterization of a micro-mechanical device subjected to high frequency periodic excitation. It is demonstrated that displacement amplitudes can be mapped across the surface of a micromachined transducer at ultrasonic frequencies.