Visualizing acoustic displacements of capacitive micromachined transducers using an interferometric microscope

L. Davis, D. Billson, D. Hutchins, R. A. Noble
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引用次数: 18

Abstract

The modification of a commercial Wyko optical profilometer to operate stroboscopically has been demonstrated. This has then been applied to the characterization of a micro-mechanical device subjected to high frequency periodic excitation. It is demonstrated that displacement amplitudes can be mapped across the surface of a micromachined transducer at ultrasonic frequencies.
用干涉显微镜观察电容式微机械换能器的声位移
一个商业Wyko光学轮廓仪的修改操作频闪已被证明。然后将其应用于受高频周期性激励的微机械装置的表征。结果表明,在超声频率下,位移振幅可以映射到微机械换能器的表面。
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