B. Turk, Terence Wong, R. Schwarzenbacher, E. Jarrell, S.H.C. Tyberg, Elbert E. Huang, J. Hedrick, E. Simonyi, Stephen M. Gates, Stephan A. Cohen, K. Malone, H. Wickland, M. Sankarapandian, M. Toney, Ho-Cheol Kim, Robert D. Miller, W. Volksen, P. Rice, L. Lurio
{"title":"Porous low-k dielectrics: Material properties","authors":"B. Turk, Terence Wong, R. Schwarzenbacher, E. Jarrell, S.H.C. Tyberg, Elbert E. Huang, J. Hedrick, E. Simonyi, Stephen M. Gates, Stephan A. Cohen, K. Malone, H. Wickland, M. Sankarapandian, M. Toney, Ho-Cheol Kim, Robert D. Miller, W. Volksen, P. Rice, L. Lurio","doi":"10.1021/bk-2004-0874.ch012","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":7648,"journal":{"name":"American Chemical Society, Polymer Preprints, Division of Polymer Chemistry","volume":"48 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2005-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"American Chemical Society, Polymer Preprints, Division of Polymer Chemistry","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1021/bk-2004-0874.ch012","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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