Liquid delivery CVD of PLZT thick films for electro-optic applications

Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics Pub Date : 1994-08-07 DOI:10.1109/ISAF.1994.522461

J. Roeder, S. Bilodeau, P. Van Buskirk, V. Ozguz, J. Ma, S. Lee

{"title":"Liquid delivery CVD of PLZT thick films for electro-optic applications","authors":"J. Roeder, S. Bilodeau, P. Van Buskirk, V. Ozguz, J. Ma, S. Lee","doi":"10.1109/ISAF.1994.522461","DOIUrl":null,"url":null,"abstract":"PLZT films in the composition range 7/0/100-32/0/100 have been deposited by CVD from a single source reagent using a liquid delivery/flash vaporization approach. Single phase perovskite films ranging in thickness from 1-5 /spl mu/m were deposited on fused silica substrates at 535/spl deg/C. The films had very strong crystallographic texture with [100] normal to the plane of the film. Optical loss per unit thickness was lower for thicker films suggesting that interfacial effects dominated losses. Very large electro-optic effects were observed in a number of the films. Birefringent shifts were measured by phase retardation in transmission mode with an electric field applied in the plane of the film using interdigitated electrodes. Birefringent shift varied quadratically with applied field and showed little hysteresis with R coefficients as high as 5/spl times/10/sup -16/ (m/V)/sup 2/. The strength of the electro-optic effect is attributed to the high degree of crystallinity of the films and the a-axis orientation.","PeriodicalId":20488,"journal":{"name":"Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics","volume":"14 1","pages":"687-690"},"PeriodicalIF":0.0000,"publicationDate":"1994-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.1994.522461","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 4

Abstract

PLZT films in the composition range 7/0/100-32/0/100 have been deposited by CVD from a single source reagent using a liquid delivery/flash vaporization approach. Single phase perovskite films ranging in thickness from 1-5 /spl mu/m were deposited on fused silica substrates at 535/spl deg/C. The films had very strong crystallographic texture with [100] normal to the plane of the film. Optical loss per unit thickness was lower for thicker films suggesting that interfacial effects dominated losses. Very large electro-optic effects were observed in a number of the films. Birefringent shifts were measured by phase retardation in transmission mode with an electric field applied in the plane of the film using interdigitated electrodes. Birefringent shift varied quadratically with applied field and showed little hysteresis with R coefficients as high as 5/spl times/10/sup -16/ (m/V)/sup 2/. The strength of the electro-optic effect is attributed to the high degree of crystallinity of the films and the a-axis orientation.

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用于电光应用的PLZT厚膜的液体输送CVD

PLZT薄膜的组成范围为7/0/100-32/0/100，通过CVD从单一源试剂使用液体输送/闪蒸方法沉积。在535℃/spl℃的温度下，在熔融石英衬底上沉积了厚度为1-5 /spl mu/m的单相钙钛矿薄膜。薄膜具有很强的晶体结构，[100]垂直于薄膜平面。单位厚度的光损耗在较厚的薄膜中较低，表明界面效应主导了损耗。在许多薄膜中观察到非常大的电光效应。双折射位移的测量是在传输模式下，用交叉指状电极在薄膜平面上施加电场，通过相位延迟测量。双折射位移随外加磁场的变化呈二次变化，表现出较小的滞后，R系数高达5/ sp1倍/10/sup -16/ (m/V)/sup 2/。电光效应的强度归因于薄膜的高结晶度和a轴取向。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics

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