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Y‐Stabilized ZrO2 as a Promising Wafer Material for the Epitaxial Growth of Transition Metal Dichalcogenides

physica status solidi (RRL) – Rapid Research Letters Pub Date : 2023-06-25 DOI:10.1002/pssr.202300141
Rongbin Wang, M. Schmidbauer, Norbert Koch, Jens Martin, S. Sadofev
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Y稳定ZrO2作为过渡金属二硫族化合物外延生长的有前途的晶圆材料
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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physica status solidi (RRL) – Rapid Research Letters
physica status solidi (RRL) – Rapid Research Letters
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