{"title":"Tutorial B: Introduction to optical metrology","authors":"Vincent Chan, Howard Huang","doi":"10.1109/ISOT.2010.5687377","DOIUrl":null,"url":null,"abstract":"In this tutorial we will have a brief overview of the basic methods and applications of optical metrology. We will discuss its uses, limitations and how it is typically used in industry. The following topics will be covered: & Background theory & Types of measurements & GD & T & Types of sensors & Limitations of optical measurements & Industrial applications This tutorial is best suited to engineers new to optical metrology.","PeriodicalId":91154,"journal":{"name":"Optomechatronic Technologies (ISOT), 2010 International Symposium on : 25-27 Oct. 2010 : [Toronto, ON]. International Symposium on Optomechatronic Technologies (2010 : Toronto, Ont.)","volume":"17 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2010-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optomechatronic Technologies (ISOT), 2010 International Symposium on : 25-27 Oct. 2010 : [Toronto, ON]. International Symposium on Optomechatronic Technologies (2010 : Toronto, Ont.)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISOT.2010.5687377","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this tutorial we will have a brief overview of the basic methods and applications of optical metrology. We will discuss its uses, limitations and how it is typically used in industry. The following topics will be covered: & Background theory & Types of measurements & GD & T & Types of sensors & Limitations of optical measurements & Industrial applications This tutorial is best suited to engineers new to optical metrology.