Narrow-linewidth ArF excimer laser with high efficiency

Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics Pub Date : 2017-05-14 DOI:10.1364/CLEO_AT.2017.JTH5A.5

Fan Yuanyuan, Song Xingliang, Z. Jiangshan, Zhou Yi

引用次数: 0

Abstract

A narrow-linewidth ArF excimer laser using a compound cavity with two oscillators but the same discharge chamber is developed. Methods for the locking of narrowband laser modes in long cavity length and insufficient mode competition are introduced.

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高效窄线宽ArF准分子激光器

研制了一种采用双振腔但放电腔相同的窄线宽ArF准分子激光器。介绍了在长腔长和模式竞争不足的情况下窄带激光模式锁定的方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics

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