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Sputtering of GaAs target under Bi+ cluster ions bombardment

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Pub Date : 2022-10-01 DOI:10.1016/j.nimb.2022.08.004
S. Akhunov, G. P. Kakhramonova, Sharifboy Axmedov, B. Kasimov, D. Usmanov
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Bi+簇离子轰击下GaAs靶材的溅射
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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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