P4M-3 Experimental Characterization of Capacitive Micromachined Ultrasonic Transducers

Abstract

In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micro- machining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.