R. Shukla, H. K. Kannojia, C. Mukherjee, P. R. Sankar, B. Thakur, A. Sinha, D. Pandey
{"title":"Challenges in fabrication of high aspect ratio electrostatic comb-drive microactuator using one-step X-ray lithography","authors":"R. Shukla, H. K. Kannojia, C. Mukherjee, P. R. Sankar, B. Thakur, A. Sinha, D. Pandey","doi":"10.1007/s41683-020-00064-z","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":91892,"journal":{"name":"ISSS journal of micro and smart systems","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2020-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ISSS journal of micro and smart systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s41683-020-00064-z","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}