Low-cost fabrication of an on-chip Fabry-Perot interferometer for dry environmental monitoring

Abstract

A silicon (110) on-chip in-plane Fabry-Perot in-terferometer (FPI) with fiber grooves and polymer reservoirs is fabricated through a single anisotropic wet etching process, resulting in high verticality and low roughness. The FPI exhibits high finesse and Q factors and is functionalized with polymers to enable temperature and gas sensing.