A Compact MEMS-Based Optical Scanning System with Large Field of View for Lidars

Abstract

In this work, a design of a compact optical MEMS-based lidar scanning system with a large field of view (FOV) and small distortion is presented. The scanning system applies an off-axis structure and the length of the system can be reduced to about 10 cm in an optimized way. Simulation results show that a large FOV is achieved under a uniform scanning scheme. In addition, the spot size less than 20 cm at distance of 100 m is also realized. The optical scanning system can be used for the vehicle-mounted Lidar.