Investigation of shadow region influence on TiN coating properties

IF 0.4 4区物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY

Russian Physics Journal Pub Date : 2025-03-24 DOI:10.1007/s11182-025-03421-3

A. V. Oleinik, A. A. Nikolaev, K. N. Ramazanov, A. Yu. Nazarov, A. R. Haitkulov, V. P. Muhamadeev, A. A. Maslov, Yu. G. Khusainov

引用次数: 0

Abstract

A TiN coating formed in the vacuum-arc discharge plasma is studied, which possesses artificially created thickness non-uniformity due to the use of the shadow mask technique. The influence of the width between the mask channels and the samples on the distributions of the coating thickness, microhardness, and adhesion is examined. A sharp decrease of the thickness in the shadow region is found to be from 45 to 95% and that of the microhardness—from 60 to 80%. No coating delamination is revealed in measuring the coating adhesion by scratch testing.

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阴影区对TiN涂层性能影响的研究

研究了一种在真空电弧放电等离子体中形成的TiN涂层，该涂层由于使用阴影掩膜技术而具有人为制造的厚度不均匀性。考察了掩膜通道与样品之间的宽度对镀层厚度、显微硬度和附着力分布的影响。阴影区的厚度急剧下降，从45%到95%，显微硬度急剧下降，从60%到80%。通过划痕试验测量涂层附着力，未发现涂层分层现象。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Russian Physics Journal PHYSICS, MULTIDISCIPLINARY-

CiteScore

1.00

自引率

50.00%

发文量

208

审稿时长

3-6 weeks

期刊介绍： Russian Physics Journal covers the broad spectrum of specialized research in applied physics, with emphasis on work with practical applications in solid-state physics, optics, and magnetism. Particularly interesting results are reported in connection with: electroluminescence and crystal phospors; semiconductors; phase transformations in solids; superconductivity; properties of thin films; and magnetomechanical phenomena.