Digitally directed beams for microscale inspection

IF 1.1 4区物理与天体物理 Q4 OPTICS

Optical Review Pub Date : 2025-04-24 DOI:10.1007/s10043-025-00965-0

Hiroshi Ohno

引用次数: 0

Abstract

A bundle of digitally directed beams, capable of instantaneously controlling their direction at every point within a field of view, is proposed for the inspection of microscale defects in manufacturing processes.

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用于微尺度检测的数字定向光束

提出了一种能够在视场内的每个点瞬时控制其方向的数字定向光束束，用于制造过程中微尺度缺陷的检测。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Optical Review 物理-光学

CiteScore

2.30

自引率

0.00%

发文量

审稿时长

2 months

期刊介绍： Optical Review is an international journal published by the Optical Society of Japan. The scope of the journal is: General and physical optics; Quantum optics and spectroscopy; Information optics; Photonics and optoelectronics; Biomedical photonics and biological optics; Lasers; Nonlinear optics; Optical systems and technologies; Optical materials and manufacturing technologies; Vision; Infrared and short wavelength optics; Cross-disciplinary areas such as environmental, energy, food, agriculture and space technologies; Other optical methods and applications.