High-precision 3D optical profilometry of non-cooperative targets by time-domain dual-comb coherent averaging

IF 3.6 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2025-04-07 DOI:10.1063/5.0262787

Ziling Wu, Haosen Shi, Peng Sun, Ameng Li, Fei Meng, Zhanjun Fang, Minglie Hu, Youjian Song

引用次数: 0

Abstract

A challenge in industrial non-contact surface mapping applications is to resolve the competing requirements of high measurement precision and sufficient large working distance. In this letter, we introduce a three-dimensional (3D) surface profilometry system with micrometer-level precision at a 100-mm working distance for non-cooperative targets by employing an electro-optic dual-comb system in conjunction with time-domain coherent averaging. The detection capability of weak diffuse reflective signals is enhanced by 15 dB via time-domain coherent averaging for 1000 times, which ensures minimum outliers in complex 3D-structure mapping applications. By further leveraging an environment-insensitive optical path, we have demonstrated the use 3D optical profilometry at the megapixel scale for various non-cooperative workpieces, validating the wide applicability of this approach.

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利用时域双梳状相干平均法对非合作目标进行高精度三维光学轮廓测量

如何解决高测量精度和足够大的工作距离的竞争要求是工业非接触式表面测绘应用面临的挑战。在这封信中，我们介绍了一个三维（3D）表面轮廓测量系统，在100毫米的工作距离上，采用电光双梳系统结合时域相干平均，具有微米级精度的非合作目标。通过1000次时域相干平均，弱漫反射信号的检测能力提高了15 dB，确保了复杂3d结构测绘应用中的最小异常值。通过进一步利用对环境不敏感的光路，我们已经展示了在各种非合作工件上使用百万像素尺度的3D光学轮廓术，验证了该方法的广泛适用性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.