High-performance magnetostatic wave resonators based on deep anisotropic etching of gadolinium gallium garnet substrates

IF 33.7 1区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

Nature Electronics Pub Date : 2025-02-27 DOI:10.1038/s41928-025-01345-x

Sudhanshu Tiwari, Anuj Ashok, Connor Devitt, Sunil A. Bhave, Renyuan Wang

引用次数: 0

Abstract

Magnetostatic wave resonators based on yttrium iron garnet (YIG) are a promising technology platform for future communication filters. Such devices have demonstrated better quality factors than acoustic resonators in the 7 GHz range and above. However, the coupling coefficients of these resonators have been limited to less than 3%, primarily due to the restricted design space that is a result of microfabrication challenges related to the patterning of gadolinium gallium garnet (GGG), the substrate material used for growing single-crystal YIG. Here we report magnetostatic wave resonators created through the anisotropic etching of GGG substrates. Our approach, which is based on the YIG-on-GGG platform, uses a transducer with a hairclip-like structure. It is created by developing a microfabrication methodology that involves thinning and deep etching (up to 100 μm) of the GGG substrate. The resulting magnetostatic wave resonators exhibit a coupling of more than 8% in the 6–20 GHz frequency range.

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来源期刊

Nature Electronics Engineering-Electrical and Electronic Engineering

CiteScore

47.50

自引率

2.30%

发文量

159

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