Fabrication of high aspect ratio and low taper angle micro-holes utilizing complex water-assisted femtosecond laser drilling

IF 4.6 2区 物理与天体物理 Q1 OPTICS
Rui Zhang , Hailong Zhang , Ronghe Ke , Xingsheng Wang
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引用次数: 0

Abstract

Water-assisted laser drilling has proven to be an effective technique for high-quality micro-holes fabrication. This study introduces an innovative hybrid approach, designated as spray water film and backside flowing water-assisted (SWF-BFWA) femtosecond laser drilling, which integrates the complementary advantages of spray water film-assisted (SWFA) and backside flowing water-assisted (BFWA) technologies. The proposed methodology combines the high processing efficiency and superior aspect ratio capabilities of SWFA with the excellent geometric precision and minimal taper characteristics inherent to BFWA. A sequential processing strategy was developed, incorporating SWF-BFWA penetration followed by BFWA modification, to achieve micro-holes with both high aspect ratios and low taper angles. To maximize processing efficiency, a single-circular modification trajectory was implemented during the BFWA stage, replacing conventional concentric circle patterns. The influence of laser parameters on modification outcomes was systematically investigated, with optimization of modification factors including the number of modifications, the single-circle diameter of the modification, and the amount of modification defocusing. Experimental results demonstrate that the optimized SWF-BFWA process enables the fabrication of high-quality micro-holes with aspect ratios exceeding 12:1 and taper angles below 0.1°. This investigation provides a comprehensive solution for laser-based fabrication of micro-holes with exceptional dimensional characteristics, offering significant potential for applications requiring high aspect ratios and minimal taper angles.
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来源期刊
CiteScore
8.50
自引率
10.00%
发文量
1060
审稿时长
3.4 months
期刊介绍: Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication. The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas: •development in all types of lasers •developments in optoelectronic devices and photonics •developments in new photonics and optical concepts •developments in conventional optics, optical instruments and components •techniques of optical metrology, including interferometry and optical fibre sensors •LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow •applications of lasers to materials processing, optical NDT display (including holography) and optical communication •research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume) •developments in optical computing and optical information processing •developments in new optical materials •developments in new optical characterization methods and techniques •developments in quantum optics •developments in light assisted micro and nanofabrication methods and techniques •developments in nanophotonics and biophotonics •developments in imaging processing and systems
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