How laser material processing can benefit from OCT technology

Michael Seiler, Samson Frank, Dennis Thelemann, Oliver Elies, Pouria Teymori, Jens Bliedtner
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Abstract

Ultrashort-pulse (USP) laser ablation enables the creation of freeform shapes that are challenging to produce with conventional optics manufacturing techniques. To maintain the industrial standards of many branches, it is crucial to not only consider material removal rates but also the surface quality and subsurface damage (SSD). This study investigates the SSD patterns generated in fused silica and quantifies key parameters such as the SSD depth by applying optical coherence tomography (OCT).

激光材料加工如何受益于OCT技术
超短脉冲(USP)激光烧蚀可以创造自由形状,这是传统光学制造技术所无法实现的。为了保持许多分支机构的工业标准,不仅要考虑材料去除率,还要考虑表面质量和亚表面损伤(SSD)。本研究通过光学相干层析成像(OCT)研究了熔融二氧化硅中产生的固态固态模式,并量化了固态固态深度等关键参数。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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