O. I. Obrezkov, Yu. V. Martynenko, M. Yu. Nagel, O. L. Shutev, S. L. Shevchuk, Yu. I. Rukina, V. E. Misnikov, S. N. Kochetov, M. A. Bazhin, D. I. Minaev, A. B. Mishenko, T. V. Churina
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引用次数: 0
Abstract
Sputtering modes strongly affect the properties of the deposited films, which are important not only in thermonuclear installations but also in numerous applications. A method is proposed for comparing the development of the relief of coatings deposited in different modes by measuring the characteristics of a double electric layer in an electrochemical cell, taking into account nonlinear effects. The influence of magnetron sputtering and deposition parameters (gas pressure, thickness, presence of a diaphragm that hinders pumping) on the relief of the coating is under investigation. The following parameters were measured: capacitance and impedance of the double electric layer, energy transfer efficiency, specific surface area.
期刊介绍：
Physics of Atomic Nuclei is a journal that covers experimental and theoretical studies of nuclear physics: nuclear structure, spectra, and properties; radiation, fission, and nuclear reactions induced by photons, leptons, hadrons, and nuclei; fundamental interactions and symmetries; hadrons (with light, strange, charm, and bottom quarks); particle collisions at high and superhigh energies; gauge and unified quantum field theories, quark models, supersymmetry and supergravity, astrophysics and cosmology.
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