Scalable deposition of SnO2 ETL via SALD for large-area inverted perovskite solar modules

IF 13.3 1区工程技术 Q1 ENGINEERING, CHEMICAL

Chemical Engineering Journal Pub Date : 2025-01-15 DOI:10.1016/j.cej.2025.159629

Xuewei Jiang, Bin Shan, Geng Ma, Yan Xu, Xing Yang, Wenbin Zhou, Chenhui Li, Fan Yang, Rong Chen

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引用次数: 0

Abstract

Tin dioxide (SnO₂) stands out as a promising candidate for the electron transport layer (ETL) in perovskite solar cells (PSCs) due to its remarkable conductivity. As PSCs progress towards commercialization, the scalability of deposition methods, cost-effectiveness, and the seamless integration of various material layers become increasingly crucial, alongside the fundamental efficiency requirements. In this study, we demonstrate large-scale deposition of SnO₂ film with low thickness non-uniformity of 2.36 % via Spatial Atomic Layer Deposition (SALD), offering a significant advantage by enabling high-throughput production of large-area films at atmospheric pressure. By exploiting the varying reactivity of oxygen precursors and modulating the flow to control oxygen vacancy defects, SnO₂ film, deposited at 100 °C with Tetrakis(dimethylamino)tin (TDMASn) and H₂O₂, achieved a high mobility of 19.4 cm² V⁻¹ s⁻¹. The 400 cm² perovskite solar modules (PSMs) with optimized SnO₂ ETL achieved a high power conversion efficiency (PCE) of 19.35 %, marking a notably high PCE of inverted PSCs with such a large area to date. This exceptional performance stems from the excellent uniformity and mobility of the SALD-deposited SnO₂ ETL, highlighting the potential of SALD in future PSM fabrication.

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来源期刊

Chemical Engineering Journal 工程技术-工程：化工

CiteScore

21.70

自引率

9.30%

发文量

6781

审稿时长

2.4 months

期刊介绍： The Chemical Engineering Journal is an international research journal that invites contributions of original and novel fundamental research. It aims to provide an international platform for presenting original fundamental research, interpretative reviews, and discussions on new developments in chemical engineering. The journal welcomes papers that describe novel theory and its practical application, as well as those that demonstrate the transfer of techniques from other disciplines. It also welcomes reports on carefully conducted experimental work that is soundly interpreted. The main focus of the journal is on original and rigorous research results that have broad significance. The Catalysis section within the Chemical Engineering Journal focuses specifically on Experimental and Theoretical studies in the fields of heterogeneous catalysis, molecular catalysis, and biocatalysis. These studies have industrial impact on various sectors such as chemicals, energy, materials, foods, healthcare, and environmental protection.