Aerosol Assisted Chemical Vapour Deposition (AACVD) of Zinc dichalcogenoimidodiphosphinate Complexes for the Deposition of Zinc Selenide Thin Films.

IF 2.5 4区 化学 Q2 CHEMISTRY, MULTIDISCIPLINARY
Temidayo Oyetunde, Martins O Omorogie, Paul O'Brien
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引用次数: 0

Abstract

Dichalcogenoimidodiphosphinate complexes of zinc [Zn{(EPiPr2)2N}2], [E=Se,Se; S,Se] were synthesized through metathetical reactions from the dichalcogenoimidodiphosphinate ligands [(EE'PiPr2NH)] (E, E'=Se, Se; S, Se). These complexes were characterized and used as single-source precursors through Aerosol-Assisted Chemical Vapour Deposition (AACVD) for the deposition of cubic zinc selenide (ZnSe) films on glass substrates. The deposition temperature occurred at 500 and 525 °C, while the flow rates of the carrier gas was 160 and 240 standard cubic centimetre (sccm). The morphology of the deposited films ranged between dense fibrous network and woven fibres. X-ray photoelectron spectroscopy (XPS) confirmed the presence of the constituent elements in zinc selenide.

气溶胶辅助化学气相沉积法(AACVD)制备硒化锌薄膜的研究。
锌[Zn{(EPiPr2)2N}2], [E=Se,Se;以二硫代基亚胺二膦酸盐配体[(EE' pipr2nh)] (E, E'=Se, Se;年代,Se)。这些配合物通过气溶胶辅助化学气相沉积(AACVD)在玻璃衬底上沉积立方硒化锌(ZnSe)薄膜,并作为单源前驱体进行了表征。沉积温度为500℃和525℃,载气流量为160和240标准立方厘米(sccm)。沉积膜的形态介于密集的网状纤维和编织纤维之间。x射线光电子能谱(XPS)证实了硒化锌中组成元素的存在。
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来源期刊
ChemistryOpen
ChemistryOpen CHEMISTRY, MULTIDISCIPLINARY-
CiteScore
4.80
自引率
4.30%
发文量
143
审稿时长
1 months
期刊介绍: ChemistryOpen is a multidisciplinary, gold-road open-access, international forum for the publication of outstanding Reviews, Full Papers, and Communications from all areas of chemistry and related fields. It is co-owned by 16 continental European Chemical Societies, who have banded together in the alliance called ChemPubSoc Europe for the purpose of publishing high-quality journals in the field of chemistry and its border disciplines. As some of the governments of the countries represented in ChemPubSoc Europe have strongly recommended that the research conducted with their funding is freely accessible for all readers (Open Access), ChemPubSoc Europe was concerned that no journal for which the ethical standards were monitored by a chemical society was available for such papers. ChemistryOpen fills this gap.
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