Improved ferroelectricity and endurance in Ca doped Hf0.5Zr0.5O2 films

IF 5.1 2区材料科学 Q1 MATERIALS SCIENCE, CERAMICS

Ceramics International Pub Date : 2024-09-24 DOI:10.1016/j.ceramint.2024.09.303

Lu Yin , Xinyu Li , Duoduo Xiao , Sijia He , Ying Zhao , Qiangxiang Peng , Qiong Yang , Yunya Liu , Chuanbin Wang

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引用次数: 0

Abstract

Doped Hf_0.5Zr_0.5O₂ materials have drawn increasing attention due to the excellent ferroelectric properties, but the relevant research is just in the preliminary stage and the reported doped systems are rare. In this work, Ca doped Hf_0.5Zr_0.5O₂ (Ca:HZO) ferroelectric films were successfully fabricated via chemical solution deposition and investigated for the first time. It is observed that Ca doping induces a phase transformation from monoclinic to orthorhombic/tetragonal and then to monoclinic/tetragonal. The highest orthorhombic phase fraction is achieved in 2.5 mol% Ca doped HZO film, contributing to the optimum ferroelectric property with the largest remnant polarization of 14.00 μC/cm² after 10⁵ cycles. Additionally, the leakage current density is observed to decrease with increasing Ca content, which is mainly associated with the changes of grain size and surface roughness. As a result, the endurance is significantly improved in the Ca doped films, and an excellent endurance of 10¹⁰ cycles is achieved in the 2.5 mol% Ca doped film. These results suggest that Ca doping can enhance the ferroelectric and endurance properties of HZO films by optimizing the phase and morphological structure.

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提高掺 Ca Hf0.5Zr0.5O2 薄膜的铁电性和耐久性

掺杂 Hf0.5Zr0.5O2 材料因其优异的铁电特性而受到越来越多的关注，但目前相关研究还处于起步阶段，报道的掺杂体系还很少。本研究首次通过化学溶液沉积法成功制备并研究了掺杂 Ca 的 Hf0.5Zr0.5O2 （Ca:HZO）铁电薄膜。研究发现，钙掺杂诱导了从单斜到正方/四方再到单斜/四方的相变。在掺杂 2.5 mol% Ca 的 HZO 薄膜中，正方晶相的比例最高，从而获得了最佳的铁电特性，105 次循环后的最大残余极化为 14.00 μC/cm2。此外，还观察到漏电流密度随 Ca 含量的增加而降低，这主要与晶粒尺寸和表面粗糙度的变化有关。因此，掺 Ca 薄膜的耐久性显著提高，掺 Ca 2.5 mol% 的薄膜达到了 1010 次循环的优异耐久性。这些结果表明，通过优化相结构和形态结构，掺杂 Ca 可以增强 HZO 薄膜的铁电性和耐久性。

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来源期刊

Ceramics International 工程技术-材料科学：硅酸盐

CiteScore

9.40

自引率

15.40%

发文量

4558

审稿时长

25 days

期刊介绍： Ceramics International covers the science of advanced ceramic materials. The journal encourages contributions that demonstrate how an understanding of the basic chemical and physical phenomena may direct materials design and stimulate ideas for new or improved processing techniques, in order to obtain materials with desired structural features and properties. Ceramics International covers oxide and non-oxide ceramics, functional glasses, glass ceramics, amorphous inorganic non-metallic materials (and their combinations with metal and organic materials), in the form of particulates, dense or porous bodies, thin/thick films and laminated, graded and composite structures. Process related topics such as ceramic-ceramic joints or joining ceramics with dissimilar materials, as well as surface finishing and conditioning are also covered. Besides traditional processing techniques, manufacturing routes of interest include innovative procedures benefiting from externally applied stresses, electromagnetic fields and energetic beams, as well as top-down and self-assembly nanotechnology approaches. In addition, the journal welcomes submissions on bio-inspired and bio-enabled materials designs, experimentally validated multi scale modelling and simulation for materials design, and the use of the most advanced chemical and physical characterization techniques of structure, properties and behaviour. Technologically relevant low-dimensional systems are a particular focus of Ceramics International. These include 0, 1 and 2-D nanomaterials (also covering CNTs, graphene and related materials, and diamond-like carbons), their nanocomposites, as well as nano-hybrids and hierarchical multifunctional nanostructures that might integrate molecular, biological and electronic components.