A miniaturized multi-mechanism resonance-enhanced fiber optic photoacoustic multi-gas sensor

IF 3.1 3区物理与天体物理 Q2 INSTRUMENTS & INSTRUMENTATION

Infrared Physics & Technology Pub Date : 2024-10-29 DOI:10.1016/j.infrared.2024.105615

Guojie Wu , Yuchen Guan , Zhenfeng Gong , Xue Wu , Liang Mei

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Abstract

A multi-mechanism resonance-enhanced fiber-optic photoacoustic multi-gas sensor (MR-FOPMS) is reported, in which the acoustic resonance of the T-type resonator is employed for C₂H₂ gas sensing and the mechanical resonance of the silicon cantilever is employed for the detection of CH₄ gas sensing. The silicon cantilever fiber-optic microphone and T-type photoacoustic resonator are designed using theoretical and finite element methods. The optimized cavity volume of the entire sensor is only 9.3 cm³ and the optimized silicon cantilever microphone has an ultra-high sensitivity of 62540.2 nm/Pa at the resonance. The ability of the sensor to detect multiple gases is demonstrated by simultaneous measurement of C₂H₂ and CH₄ using two DFB lasers at 1532.8 nm and 1650.96 nm as excitation sources. The lowest detection limits of the sensor are determined to be 158 and 382 ppb for C₂H₂ and CH₄, respectively, corresponding to normalized noise equivalent absorption coefficients of 2.82 × 10^-9, 1.43 × 10^-9 cm⁻¹ W Hz^−1/2, respectively.

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微型多机制共振增强光纤光声多气体传感器

报告了一种多机制共振增强光纤光声多气体传感器（MR-FOPMS），其中利用 T 型谐振器的声学共振进行 C2H2 气体传感，利用硅悬臂的机械共振进行 CH4 气体传感检测。采用理论和有限元方法设计了硅悬臂光纤传声器和 T 型光声谐振器。整个传感器的优化腔体体积仅为 9.3 cm3，优化后的硅悬臂传声器在共振时具有 62540.2 nm/Pa 的超高灵敏度。使用 1532.8 nm 和 1650.96 nm 的两个 DFB 激光作为激发光源同时测量 C2H2 和 CH4，证明了该传感器检测多种气体的能力。传感器对 C2H2 和 CH4 的最低检测限分别为 158 和 382 ppb，对应的归一化噪声等效吸收系数分别为 2.82 × 10-9 和 1.43 × 10-9 cm-1 W Hz-1/2。

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来源期刊

Infrared Physics & Technology 物理-光学

CiteScore

5.70

自引率

12.10%

发文量

400

审稿时长

67 days

期刊介绍： The Journal covers the entire field of infrared physics and technology: theory, experiment, application, devices and instrumentation. Infrared'' is defined as covering the near, mid and far infrared (terahertz) regions from 0.75um (750nm) to 1mm (300GHz.) Submissions in the 300GHz to 100GHz region may be accepted at the editors discretion if their content is relevant to shorter wavelengths. Submissions must be primarily concerned with and directly relevant to this spectral region. Its core topics can be summarized as the generation, propagation and detection, of infrared radiation; the associated optics, materials and devices; and its use in all fields of science, industry, engineering and medicine. Infrared techniques occur in many different fields, notably spectroscopy and interferometry; material characterization and processing; atmospheric physics, astronomy and space research. Scientific aspects include lasers, quantum optics, quantum electronics, image processing and semiconductor physics. Some important applications are medical diagnostics and treatment, industrial inspection and environmental monitoring.