UV-activated TiO2/SnO2 oxygen sensor with improved response speed for low temperature and air-atmospheric operation

IF 8 1区化学 Q1 CHEMISTRY, ANALYTICAL

Sensors and Actuators B: Chemical Pub Date : 2024-11-14 DOI:10.1016/j.snb.2024.136947

Ruichen Shang , Hui Huang , Chenyang Liu , Mengyuan Wang

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引用次数: 0

Abstract

An UV-activated TiO₂/SnO₂ thin-film oxygen sensor was fabricated by simple sputtering deposition and thermal annealing. It was found that introducing TiO₂ film can obviously increase the response speed of the sensor (∼ 2 fold increase with 20 nm TiO₂ introducing). Moreover, it was found that introducing TiO₂ would lead to the formation of orthorhombic phase of SnO₂, due to the dissolution of Ti into Sn metal. The sensor can detect oxygen in air atmosphere (detection limit of 1 % oxygen concentration) at low operating temperature (92 °C) with good long-term stability, selectivity and anti-humidity. Effects of TiO₂ and SnO₂ thickness on sensing performance were investigated, and related detection mechanism was discussed. To our knowledge, it is the first demonstration that introducing TiO₂ into SnO₂ can improve the O₂ response speed, especially at low operating temperature (92 °C).

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紫外线激活的 TiO2/SnO2 氧气传感器，响应速度更快，适用于低温和空气-大气操作

通过简单的溅射沉积和热退火，制备了紫外线激活的 TiO2/SnO2 薄膜氧气传感器。研究发现，引入 TiO2 薄膜可明显提高传感器的响应速度（20 nm TiO2 涂层可提高约 2 倍）。此外，研究还发现，TiO2 的引入会导致 SnO2 正方体相的形成，这是由于 Ti 溶入了 Sn 金属。该传感器可在低工作温度（92°C）下检测空气中的氧气（检测限为 1%的氧气浓度），具有良好的长期稳定性、选择性和抗潮湿性。研究了 TiO2 和 SnO2 厚度对传感性能的影响，并讨论了相关的检测机理。据我们所知，这是首次证明在二氧化锡中引入 TiO2 可以提高氧气响应速度，尤其是在低工作温度（92°C）下。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Sensors and Actuators B: Chemical 工程技术-电化学

CiteScore

14.60

自引率

11.90%

发文量

1776

审稿时长

3.2 months

期刊介绍： Sensors & Actuators, B: Chemical is an international journal focused on the research and development of chemical transducers. It covers chemical sensors and biosensors, chemical actuators, and analytical microsystems. The journal is interdisciplinary, aiming to publish original works showcasing substantial advancements beyond the current state of the art in these fields, with practical applicability to solving meaningful analytical problems. Review articles are accepted by invitation from an Editor of the journal.