Wavefront sensing and optical surface measurement method based on reference light modulation

IF 3.5 2区工程技术 Q2 OPTICS

Optics and Lasers in Engineering Pub Date : 2024-10-30 DOI:10.1016/j.optlaseng.2024.108659

Xie Li, Junkang Guo, Kunpeng Liu, Zhigang Liu

引用次数: 0

Abstract

This paper proposes a reflection-type surface coherent interferometric modulation imaging (R-CIMI) method based on reference light modulation, leveraging the interference light path generated by the reflected beam of the modulator and the target surface. Furthermore, we present a mask optimization strategy to enhance the similarity of diffraction pattern structures, as well as an automatic positioning approach based on optical field estimation. Owing to the anti-disturbance properties of coherent diffraction imaging, R-CIMI is less susceptible to environmental disturbances than conventional interference techniques. Simulations and experiments demonstrate that the proposed method is comparable to conventional interference methods in terms of measurement accuracy.

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基于参考光调制的波前传感和光学表面测量方法

本文提出了一种基于参考光调制的反射型表面相干干涉调制成像（R-CIMI）方法，利用了调制器反射光束与目标表面产生的干涉光路。此外，我们还提出了增强衍射图样结构相似性的掩模优化策略，以及基于光场估计的自动定位方法。由于相干衍射成像的抗干扰特性，R-CIMI 比传统干扰技术更不易受环境干扰的影响。模拟和实验证明，所提出的方法在测量精度方面可与传统干涉方法相媲美。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Optics and Lasers in Engineering 工程技术-光学

CiteScore

8.90

自引率

8.70%

发文量

384

审稿时长

42 days

期刊介绍： Optics and Lasers in Engineering aims at providing an international forum for the interchange of information on the development of optical techniques and laser technology in engineering. Emphasis is placed on contributions targeted at the practical use of methods and devices, the development and enhancement of solutions and new theoretical concepts for experimental methods. Optics and Lasers in Engineering reflects the main areas in which optical methods are being used and developed for an engineering environment. Manuscripts should offer clear evidence of novelty and significance. Papers focusing on parameter optimization or computational issues are not suitable. Similarly, papers focussed on an application rather than the optical method fall outside the journal''s scope. The scope of the journal is defined to include the following: -Optical Metrology- Optical Methods for 3D visualization and virtual engineering- Optical Techniques for Microsystems- Imaging, Microscopy and Adaptive Optics- Computational Imaging- Laser methods in manufacturing- Integrated optical and photonic sensors- Optics and Photonics in Life Science- Hyperspectral and spectroscopic methods- Infrared and Terahertz techniques