Investigating the influence mechanism of aluminum doping amount on the density and grain size of AZO target through phase-field simulation

IF 5.8 2区材料科学 Q1 MATERIALS SCIENCE, CERAMICS

Journal of The European Ceramic Society Pub Date : 2024-10-21 DOI:10.1016/j.jeurceramsoc.2024.117013

Xiaokai Liu , Wenyu Zhang , Benshuang Sun , Huiyu Zhang , Hongjun Yuan , Hetao Zhao , Yongge Zhao , Xina Liang , Yuanpei Yang , Jianhang Zhang , Yongchun Shu , Yang Liu , Jilin He

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Abstract

This study proposes a three-phase model (primary, secondary, and pore phases) utilizing the phase-field method to simulate sintering densification in AZO targets. The impact of secondary phase content and dimensions on the densification of AZO targets was investigated. The findings indicated that the density of the AZO target exhibited an initial increase followed by a subsequent decline with the augmentation of the secondary phase content and size. Conversely, the grain size demonstrated a continuous reduction. The Brook kinetic equation yields activation energies for grain growth of 607.40 kJ/mol, 999.32 kJ/mol, and 1093.20 kJ/mol for 1 wt%, 2 wt%, and 3 wt% Al₂O₃, respectively. Furthermore, the viability of the model was corroborated through experimentation. Based on the simulation outcomes, AZO targets doped with 2 wt% Al₂O₃ achieved 99.78 % densification, an average grain size of 3.92 μm, and a resistivity of 1.38 mΩ·cm.

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通过相场模拟研究铝掺杂量对 AZO 靶材密度和晶粒尺寸的影响机制

本研究提出了一个三相模型（原生相、次生相和孔隙相），利用相场法来模拟 AZO 靶件的烧结致密化。研究了次生相的含量和尺寸对 AZO 靶件致密化的影响。研究结果表明，随着次生相含量和尺寸的增加，AZO 靶件的密度最初会增加，随后会下降。相反，晶粒大小则呈现持续减小的趋势。布鲁克动力学方程得出 1 wt%、2 wt% 和 3 wt% Al2O3 的晶粒生长活化能分别为 607.40 kJ/mol、999.32 kJ/mol 和 1093.20 kJ/mol。此外，实验也证实了该模型的可行性。根据模拟结果，掺杂了 2 wt% Al₂O₃的 AZO 靶件实现了 99.78 % 的致密化，平均晶粒大小为 3.92 μm，电阻率为 1.38 mΩ-cm。

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来源期刊

Journal of The European Ceramic Society 工程技术-材料科学：硅酸盐

CiteScore

10.70

自引率

12.30%

发文量

863

审稿时长

35 days

期刊介绍： The Journal of the European Ceramic Society publishes the results of original research and reviews relating to ceramic materials. Papers of either an experimental or theoretical character will be welcomed on a fully international basis. The emphasis is on novel generic science concerning the relationships between processing, microstructure and properties of polycrystalline ceramics consolidated at high temperature. Papers may relate to any of the conventional categories of ceramic: structural, functional, traditional or composite. The central objective is to sustain a high standard of research quality by means of appropriate reviewing procedures.