Effect of Annealing on the Lateral Homogeneity of Ti/InAlAs Schottky Barriers

IF 0.48 Q4 Physics and Astronomy

Bulletin of the Russian Academy of Sciences: Physics Pub Date : 2024-10-14 DOI:10.1134/S1062873824707736

I. Yu. Genze, M. S. Aksenov, D. V. Dmitriev

引用次数: 0

Abstract

The authors study the effect the temperature (300–450°C) and period (0–20 min) of annealing have on the parameters (barrier height and ideality factor) and homogeneity of Au/Pt/Ti/i(n)‒In_0.52Al_0.48As(001) Schottky barriers. The homogeneity of the Schottky barriers is determined by analyzing the temperature dependences of their parameters in the range of 80–350 K and the Richardson plots in the Tung model.

Abstract Image

查看原文本刊更多论文

退火对 Ti/InAlAs 肖特基势垒横向均匀性的影响

作者研究了退火温度（300-450°C）和退火周期（0-20 分钟）对 Au/Pt/Ti/i(n)-In0.52Al0.48As(001) 肖特基势垒的参数（势垒高度和理想因子）和均匀性的影响。肖特基势垒的均匀性是通过分析其参数在 80-350 K 范围内的温度相关性和 Tung 模型中的 Richardson 图确定的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Bulletin of the Russian Academy of Sciences: Physics Physics and Astronomy-Physics and Astronomy (all)

CiteScore

0.90

自引率

0.00%

发文量

251

期刊介绍： Bulletin of the Russian Academy of Sciences: Physics is an international peer reviewed journal published with the participation of the Russian Academy of Sciences. It presents full-text articles (regular, letters to the editor, reviews) with the most recent results in miscellaneous fields of physics and astronomy: nuclear physics, cosmic rays, condensed matter physics, plasma physics, optics and photonics, nanotechnologies, solar and astrophysics, physical applications in material sciences, life sciences, etc. Bulletin of the Russian Academy of Sciences: Physics focuses on the most relevant multidisciplinary topics in natural sciences, both fundamental and applied. Manuscripts can be submitted in Russian and English languages and are subject to peer review. Accepted articles are usually combined in thematic issues on certain topics according to the journal editorial policy. Authors featured in the journal represent renowned scientific laboratories and institutes from different countries, including large international collaborations. There are globally recognized researchers among the authors: Nobel laureates and recipients of other awards, and members of national academies of sciences and international scientific societies.