Fast Numerical Calculation of X-Ray Diffraction from Crystal Microsystems

Abstract

In the kinematical approximation, a method for rapid numerical calculation of X-ray diffraction from thin crystalline microsystems has been developed. The speed of calculating of reciprocal space maps using this approach is three to four orders of magnitude higher than calculations based on the Takagi–Taupin equations or two-dimensional recurrence relations. Within the framework of the obtained solutions, numerical simulation of X-ray reciprocal space mapping was performed for three models of crystal chips of microsystems.