{"title":"Hyperspectral X-Ray Imaging For Nanometrology","authors":"A. I. Safonov, K. V. Nikolaev, S. N. Yakunin","doi":"10.1134/S1063774524601400","DOIUrl":null,"url":null,"abstract":"<p>A position-sensitive spectrometer with subpixel spatial resolution on the basis of a CCD camera has been implemented. The spectrometer operation is based on the proposed algorithm for real-time analysis of frames with single photon-induced events. The factors affecting the energy resolution, formation of artifacts in energy spectra, and count efficiency are analyzed. An algorithm for obtaining subpixel resolution with application of singular value decomposition is proposed. The algorithm operation has been tested on synthesized experimental data and in a live experiment with registration of the spatial and energy structure of X-ray fluorescence emission from a layered system. The application potential of hyperspectral imaging for the experimental method of X-ray standing waves in the geometry of normal incidence and grazing X-ray fluorescence emission is demonstrated.</p>","PeriodicalId":527,"journal":{"name":"Crystallography Reports","volume":null,"pages":null},"PeriodicalIF":0.6000,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Crystallography Reports","FirstCategoryId":"88","ListUrlMain":"https://link.springer.com/article/10.1134/S1063774524601400","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"CRYSTALLOGRAPHY","Score":null,"Total":0}
引用次数: 0
Abstract
A position-sensitive spectrometer with subpixel spatial resolution on the basis of a CCD camera has been implemented. The spectrometer operation is based on the proposed algorithm for real-time analysis of frames with single photon-induced events. The factors affecting the energy resolution, formation of artifacts in energy spectra, and count efficiency are analyzed. An algorithm for obtaining subpixel resolution with application of singular value decomposition is proposed. The algorithm operation has been tested on synthesized experimental data and in a live experiment with registration of the spatial and energy structure of X-ray fluorescence emission from a layered system. The application potential of hyperspectral imaging for the experimental method of X-ray standing waves in the geometry of normal incidence and grazing X-ray fluorescence emission is demonstrated.
在 CCD 摄像机的基础上，实现了具有亚像素空间分辨率的位置敏感光谱仪。分光计的运行基于所提出的算法，用于实时分析单光子诱发事件的帧。分析了影响能量分辨率、能谱伪影形成和计数效率的因素。提出了一种应用奇异值分解获得亚像素分辨率的算法。该算法的运行已在合成的实验数据上进行了测试，并在现场实验中对来自分层系统的 X 射线荧光发射的空间和能量结构进行了登记。证明了高光谱成像在法线入射和掠射 X 射线荧光发射几何形状的 X 射线驻波实验方法中的应用潜力。
期刊介绍：
Crystallography Reports is a journal that publishes original articles short communications, and reviews on various aspects of crystallography: diffraction and scattering of X-rays, electrons, and neutrons, determination of crystal structure of inorganic and organic substances, including proteins and other biological substances; UV-VIS and IR spectroscopy; growth, imperfect structure and physical properties of crystals; thin films, liquid crystals, nanomaterials, partially disordered systems, and the methods of studies.
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