A Study of the Space Charge-Limited Injection Currents in TiO2-Based Thin-Film Metal-Dielectric Structures

IF 0.5 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

Inorganic Materials: Applied Research Pub Date : 2024-10-09 DOI:10.1134/S2075113324700850

D. K. Nikiforov, V. V. Andreev, G. G. Bondarenko

引用次数: 0

Abstract

Space charge-limited currents in Ti–TiO₂ thin-film structures have been studied. Using the experimental physical parameters of the TiO₂ dielectric, models of the formation of the space charge-limited injection currents have been constructed. The dependences of the injection current on the applied voltage, dielectric layer thickness, and parameters of electron traps have been explored. It is shown that the space charge-limited injection currents in the investigated structures depend significantly on both the depth and concentration of traps. The results obtained are compared with the dependences obtained previously for the BeO, Al₂O₃, and AlN structures.

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二氧化钛薄膜金属电介质结构中的空间电荷限制注入电流研究

研究了二氧化钛薄膜结构中的空间电荷限制电流。利用二氧化钛电介质的实验物理参数，构建了空间电荷限制注入电流的形成模型。研究探讨了注入电流与外加电压、电介质层厚度和电子阱参数的关系。结果表明，所研究结构中的空间电荷限制注入电流在很大程度上取决于陷阱的深度和浓度。研究结果与之前获得的 BeO、Al2O3 和 AlN 结构的相关性进行了比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Inorganic Materials: Applied Research Engineering-Engineering (all)

CiteScore

0.90

自引率

0.00%

发文量

199

期刊介绍： Inorganic Materials: Applied Research contains translations of research articles devoted to applied aspects of inorganic materials. Best articles are selected from four Russian periodicals: Materialovedenie, Perspektivnye Materialy, Fizika i Khimiya Obrabotki Materialov, and Voprosy Materialovedeniya and translated into English. The journal reports recent achievements in materials science: physical and chemical bases of materials science; effects of synergism in composite materials; computer simulations; creation of new materials (including carbon-based materials and ceramics, semiconductors, superconductors, composite materials, polymers, materials for nuclear engineering, materials for aircraft and space engineering, materials for quantum electronics, materials for electronics and optoelectronics, materials for nuclear and thermonuclear power engineering, radiation-hardened materials, materials for use in medicine, etc.); analytical techniques; structure–property relationships; nanostructures and nanotechnologies; advanced technologies; use of hydrogen in structural materials; and economic and environmental issues. The journal also considers engineering issues of materials processing with plasma, high-gradient crystallization, laser technology, and ultrasonic technology. Currently the journal does not accept direct submissions, but submissions to one of the source journals is possible.