Liquid-immersion inclined-rotated exposure system for fabricating three-dimensional microstructures with large inclination angles

IF 2.4 4区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Micromechanics and Microengineering Pub Date : 2024-08-27 DOI:10.1088/1361-6439/ad6fab

Gakuto Kagawa, Hidetoshi Takahashi

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引用次数: 0

Abstract

This study utilized liquid-immersion inclined-rotated ultraviolet lithography to fabricate three-dimensional (3D) microstructures. The maximum achievable inclination angles obtained through conventional inclined-rotated exposure (IRE) methods were limited by the significant refractive index differences in material. We proposed an IRE with liquid-immersion and adjustable mirrors, which enabled greater inclination angles with improved adjustability. Using liquid as a medium helped minimize the refractive index disparities between materials. We fabricated polydimethylsiloxane molds for micro suction cup (MSC) array sheets to evaluate the performance of the developed liquid-immersion IRE. The resulting MSC array sheets (10 mm²) with a suction cup diameter of 500 μm, achieved inclination angles up to 51°, approximately double those obtained with the conventional IRE method. In addition, the suction force of the fabricated MSC arrays were evaluated by pulling along the vertical, horizontal, and edge directions under wet conditions. The maximum measured suction force was 0.15 N, confirming the effectiveness of the proposed liquid-immersion IRE in fabricating 3D microstructures, as demonstrated by the fabricated MSC array sheets.

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用于制造大倾角三维微结构的液体浸入式倾斜旋转曝光系统

本研究利用液体浸入式倾斜旋转紫外线光刻技术制造三维（3D）微结构。传统的倾斜旋转曝光（IRE）方法所能达到的最大倾斜角度受到材料折射率差异的限制。我们提出了一种采用液体浸入式和可调镜面的 IRE，它能实现更大的倾斜角，并具有更好的可调节性。使用液体作为介质有助于最大限度地减少材料之间的折射率差异。我们为微型吸盘（MSC）阵列片制作了聚二甲基硅氧烷模具，以评估所开发的液浸 IRE 的性能。制成的 MSC 阵列片（10 mm2）吸盘直径为 500 μm，可实现高达 51° 的倾斜角，约为传统 IRE 方法的两倍。此外，在潮湿条件下，通过沿垂直、水平和边缘方向拉动，对制造的 MSC 阵列的吸力进行了评估。测得的最大吸力为 0.15 N，这证实了拟议的液浸 IRE 在制造三维微结构方面的有效性，所制造的 MSC 阵列片也证明了这一点。

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来源期刊

Journal of Micromechanics and Microengineering 工程技术-材料科学：综合

CiteScore

4.50

自引率

4.30%

发文量

136

审稿时长

2.8 months

期刊介绍： Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data. The journal is focussed on all aspects of: -nano- and micro- mechanical systems -nano- and micro- electomechanical systems -nano- and micro- electrical and mechatronic systems -nano- and micro- engineering -nano- and micro- scale science Please note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering. Below are some examples of the topics that are included within the scope of the journal: -MEMS and NEMS: Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc. -Fabrication techniques and manufacturing: Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing. -Packaging and Integration technologies. -Materials, testing, and reliability. -Micro- and nano-fluidics: Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip. -Lab-on-a-chip and micro- and nano-total analysis systems. -Biomedical systems and devices: Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces. -Energy and power: Including power MEMS/NEMS, energy harvesters, actuators, microbatteries. -Electronics: Including flexible electronics, wearable electronics, interface electronics. -Optical systems. -Robotics.