Low-Temperature Fabrication of BiFeO₃ Films on Aluminum Foils under a N₂-Rich Atmosphere.

IF 4.4 3区材料科学 Q2 CHEMISTRY, MULTIDISCIPLINARY

Nanomaterials Pub Date : 2024-08-14 DOI:10.3390/nano14161343

Jing Yan

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Abstract

To be CMOS-compatible, a low preparation temperature (<500 °C) for ferroelectric films is required. In this study, BiFeO₃ films were successfully fabricated at a low annealing temperature (<450 °C) on aluminum foils by a metal-organic decomposition process. The effect of the annealing atmosphere on the performance of BiFeO₃ films was assessed at 440 ± 5 °C. By using a N₂-rich atmosphere, a large remnant polarization (P_r~78.1 μC/cm² @ 1165.2 kV/cm), and a high rectangularity (~91.3% @ 1165.2 kV/cm) of the P-E loop, excellent charge-retaining ability of up to 1.0 × 10³ s and outstanding fatigue resistance after 1.0 × 10⁹ switching cycles could be observed. By adopting a N₂-rich atmosphere and aluminum foil substrates, acceptable electrical properties (P_r~70 μC/cm² @ 1118.1 kV/cm) of the BiFeO₃ films were achieved at the very low annealing temperature of 365 ± 5 °C. These results offer a new approach for lowering the annealing temperature for integrated ferroelectrics in high-density FeRAM applications.

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在富含 N2 的大气中低温制备铝箔上的 BiFeO3 薄膜。

为了与 CMOS 兼容，制备温度较低（在 440 ± 5 °C 的低退火温度下成功制备了 3 层薄膜）。通过使用富含 N2 的气氛，可以观察到较大的残余极化（Pr~78.1 μC/cm2 @ 1165.2 kV/cm）和较高的 P-E 环矩形度（~91.3% @ 1165.2 kV/cm），以及高达 1.0 × 103 s 的出色电荷保持能力和 1.0 × 109 开关周期后的出色抗疲劳性。通过采用富含 N2 的气氛和铝箔基底，BiFeO3 薄膜在 365 ± 5 °C 的极低退火温度下实现了可接受的电性能（Pr~70 μC/cm2 @ 1118.1 kV/cm）。这些结果为降低高密度 FeRAM 应用中集成铁电体的退火温度提供了一种新方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nanomaterials NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY

CiteScore

8.50

自引率

9.40%

发文量

3841

审稿时长

14.22 days

期刊介绍： Nanomaterials (ISSN 2076-4991) is an international and interdisciplinary scholarly open access journal. It publishes reviews, regular research papers, communications, and short notes that are relevant to any field of study that involves nanomaterials, with respect to their science and application. Thus, theoretical and experimental articles will be accepted, along with articles that deal with the synthesis and use of nanomaterials. Articles that synthesize information from multiple fields, and which place discoveries within a broader context, will be preferred. There is no restriction on the length of the papers. Our aim is to encourage scientists to publish their experimental and theoretical research in as much detail as possible. Full experimental or methodical details, or both, must be provided for research articles. Computed data or files regarding the full details of the experimental procedure, if unable to be published in a normal way, can be deposited as supplementary material. Nanomaterials is dedicated to a high scientific standard. All manuscripts undergo a rigorous reviewing process and decisions are based on the recommendations of independent reviewers.

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