Gold as a Promising Electrode Material for LiNbO3-on-Insulator (LNOI) SH-SAW Resonators: An Experimental Study

IF 3 2区工程技术 Q1 ACOUSTICS

IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-08-22 DOI:10.1109/TUFFC.2024.3448217

Tzu-Hsuan Hsu;Zhi-Qiang Lee;Guan-Lin Wu;Chun-Chen Yeh;Chia-Hsien Tsai;Ming-Huang Li

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引用次数: 0

Abstract

The need for wideband radio frequency front ends (RFFEs) with next-generation wireless protocols highlights the importance of electromechanical coupling

${k}_{\text {eff}}^{{2}}$

. The hetero acoustic layered (HAL) surface acoustic wave (SAW) resonator with aluminum (Al) electrodes has shown superior performance compared to conventional SAW devices. Despite gold (Au) having excellent conductivity and stable properties, its high acoustic absorption and low phase velocity have made it less favorable for electrodes. This work demonstrates that high-performance shear horizontal (SH)-SAW resonators can be fabricated on the lithium niobate-on-insulator (LNOI) platform using a setup specifically designed for an Au electrodes. Experimental validation shows that the device achieves a high quality factor (Q) over 870, excellent

${k}_{\text {eff}}^{{2}}$

up to 40%, and operates around 765 MHz. Unwanted transverse spurious modes are suppressed through adequate electrode design, and the temperature stability of LNOI SH-SAW with Au electrodes is discussed. This study highlights gold’s potential as an electrode material for high

${k}_{\text {eff}}^{{2}}$

, clean spectrum, and wideband applications.

查看原文本刊更多论文

金作为铌酸锂绝缘体（LNOI）SH-SAW 谐振器的理想电极材料：实验研究。

摘要--下一代无线协议对宽带射频前端（RFFE）的需求凸显了机电耦合 kpff2 的重要性。与传统声表面波（SAW）器件相比，带有铝（Al）电极的异声分层（HAL）声表面波（SAW）谐振器表现出更优越的性能。尽管金（Au）具有出色的导电性和稳定的特性，但其高吸声性和低相速度使其不太适合用作电极。这项研究表明，利用专门为金电极设计的装置，可以在绝缘体上的铌酸锂 (LNOI) 平台上制造出高性能剪切水平 (SH) 声表面波谐振器。实验验证表明，该器件的品质因数（Q）超过 870，keff2 高达 40%，工作频率约为 765 MHz。通过适当的电极设计抑制了不必要的横向杂散模式，并讨论了使用金电极的 LNOI SH-SAW 的温度稳定性。这项研究凸显了金作为电极材料在高 keff2、洁净频谱和宽带应用方面的潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE transactions on ultrasonics, ferroelectrics, and frequency control 工程技术-工程：电子与电气

CiteScore

7.70

自引率

16.70%

发文量

583

审稿时长

4.5 months

期刊介绍： IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control includes the theory, technology, materials, and applications relating to: (1) the generation, transmission, and detection of ultrasonic waves and related phenomena; (2) medical ultrasound, including hyperthermia, bioeffects, tissue characterization and imaging; (3) ferroelectric, piezoelectric, and piezomagnetic materials, including crystals, polycrystalline solids, films, polymers, and composites; (4) frequency control, timing and time distribution, including crystal oscillators and other means of classical frequency control, and atomic, molecular and laser frequency control standards. Areas of interest range from fundamental studies to the design and/or applications of devices and systems.