Highly c-axis-oriented apatite-type lanthanum silicate thin films fabricated by magnetron sputtering under bias

IF 4.3 3区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Materials Chemistry and Physics Pub Date : 2024-08-12 DOI:10.1016/j.matchemphys.2024.129852

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Abstract

The development of apatite-type lanthanum silicate (LSO) thin films with enhanced c-axis orientation has received attention because highly c-axis oriented LSO is an attractive electrolyte for lowering the operating temperature of solid oxide cells. In this study, the effect of thin-film conditions in magnetron sputtering on the c-axis orientation of LSO thin films after crystallization were investigated. X-ray diffraction and X-ray reflectivity measurements revealed that the c-axis orientation of LSO thin films after crystallization is correlated with the density of the amorphous thin films deposited by magnetron sputtering. Bias application during magnetron sputtering effectively increased the c-axis orientation of crystallized LSO thin films, which showed extremely high c-axis orientation (Lotgering factor of 0.99). This thin film consisted of columnar grains, most of which were c-axis oriented, as confirmed by direct observation using scanning transmission electron microscopy.

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在偏压条件下通过磁控溅射制造的高 c 轴定向磷灰石型硅酸镧薄膜

具有增强的 c 轴取向的磷灰石型硅酸镧（LSO）薄膜的开发备受关注，因为高 c 轴取向的 LSO 是一种极具吸引力的电解质，可用于降低固体氧化物电池的工作温度。本研究调查了磁控溅射中的薄膜条件对结晶后 LSO 薄膜 c 轴取向的影响。X 射线衍射和 X 射线反射率测量结果表明，结晶后 LSO 薄膜的 c 轴取向与磁控溅射沉积的非晶薄膜密度相关。在磁控溅射过程中施加偏压可有效提高结晶 LSO 薄膜的 c 轴取向，使其显示出极高的 c 轴取向（Lotgering 因子为 0.99）。通过扫描透射电子显微镜的直接观察证实，这种薄膜由柱状晶粒组成，其中大部分晶粒呈 c 轴取向。

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来源期刊

Materials Chemistry and Physics 工程技术-材料科学：综合

CiteScore

8.70

自引率

4.30%

发文量

1515

审稿时长

69 days

期刊介绍： Materials Chemistry and Physics is devoted to short communications, full-length research papers and feature articles on interrelationships among structure, properties, processing and performance of materials. The Editors welcome manuscripts on thin films, surface and interface science, materials degradation and reliability, metallurgy, semiconductors and optoelectronic materials, fine ceramics, magnetics, superconductors, specialty polymers, nano-materials and composite materials.