{"title":"Formation mechanism of optical waveguide in α-Quartz by ultrashort pulse laser","authors":"Reina Yoshizaki , Tomohiro Fukui , Masayuki Nakao (1)","doi":"10.1016/j.cirp.2024.04.077","DOIUrl":null,"url":null,"abstract":"<div><p>Optical waveguides are crucial in the development of integrated optical circuits. This study examines their formation in dielectric materials using ultrashort pulse laser direct writing. Emphasizing the significance of the processing parameters for writing low-loss waveguides, we explored the underlying mechanisms through in situ observations of internal modifications and a detailed analysis of electron density and refractive index changes. Employing a combination of pump-probe imaging and Mach-Zehnder interferometry, we reveal the dynamics of laser-induced modifications in quartz, highlighting the influence of spatial overlap and irradiation spacing. Our research offers insights into the micro-level phenomena that affect the overall waveguide performance, thereby providing enhanced fabrication methods.</p></div>","PeriodicalId":55256,"journal":{"name":"Cirp Annals-Manufacturing Technology","volume":"73 1","pages":"Pages 161-164"},"PeriodicalIF":3.2000,"publicationDate":"2024-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S0007850624000891/pdfft?md5=e92adfcaca4e27ad87c43c9705ac021c&pid=1-s2.0-S0007850624000891-main.pdf","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Cirp Annals-Manufacturing Technology","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0007850624000891","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, INDUSTRIAL","Score":null,"Total":0}
引用次数: 0
Abstract
Optical waveguides are crucial in the development of integrated optical circuits. This study examines their formation in dielectric materials using ultrashort pulse laser direct writing. Emphasizing the significance of the processing parameters for writing low-loss waveguides, we explored the underlying mechanisms through in situ observations of internal modifications and a detailed analysis of electron density and refractive index changes. Employing a combination of pump-probe imaging and Mach-Zehnder interferometry, we reveal the dynamics of laser-induced modifications in quartz, highlighting the influence of spatial overlap and irradiation spacing. Our research offers insights into the micro-level phenomena that affect the overall waveguide performance, thereby providing enhanced fabrication methods.
期刊介绍：
CIRP, The International Academy for Production Engineering, was founded in 1951 to promote, by scientific research, the development of all aspects of manufacturing technology covering the optimization, control and management of processes, machines and systems.
This biannual ISI cited journal contains approximately 140 refereed technical and keynote papers. Subject areas covered include:
Assembly, Cutting, Design, Electro-Physical and Chemical Processes, Forming, Abrasive processes, Surfaces, Machines, Production Systems and Organizations, Precision Engineering and Metrology, Life-Cycle Engineering, Microsystems Technology (MST), Nanotechnology.
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