Efficient mass manufacturing of high-density, ultralow-loss Si₃N₄ photonic integrated circuits

IF 8.4 1区物理与天体物理 Q1 OPTICS

Optica Pub Date : 2024-08-08 DOI:10.1364/optica.529673

Xinru Ji, R. N. Wang, Yang Liu, J. Riemensberger, Zheru Qiu, T. Kippenberg

引用次数: 0

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高效大规模制造高密度、超低损耗 Si₃N₄ 光电集成电路

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Optica OPTICS-

CiteScore

19.70

自引率

2.90%

发文量

191

审稿时长

2 months

期刊介绍： Optica is an open access, online-only journal published monthly by Optica Publishing Group. It is dedicated to the rapid dissemination of high-impact peer-reviewed research in the field of optics and photonics. The journal provides a forum for theoretical or experimental, fundamental or applied research to be swiftly accessed by the international community. Optica is abstracted and indexed in Chemical Abstracts Service, Current Contents/Physical, Chemical & Earth Sciences, and Science Citation Index Expanded.

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