Peng Ji, Wa Tang, Haixiang Hu, Rongkuan Leng, Guan-Lei Qiao, Xuejun Zhang
{"title":"Towards a better understanding of the smoothing effect in gas cluster ion beam processing with molecular dynamics simulation and experiment","authors":"Peng Ji, Wa Tang, Haixiang Hu, Rongkuan Leng, Guan-Lei Qiao, Xuejun Zhang","doi":"10.1364/oe.533111","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":509080,"journal":{"name":"Optics Express","volume":"6 3","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-08-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics Express","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oe.533111","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}