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Effect of Deposition Temperature on Optical Properties of Porous Amorphous SiC Film

Journal of Wuhan University of Technology-Mater. Sci. Ed. Pub Date : 2024-07-05 DOI:10.1007/s11595-024-2944-0
Jixiang Xu, Weijie Tao, Canhui Liu, Haoyao Xu, Lixuan Li, Zhenhua He
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沉积温度对多孔非晶碳化硅薄膜光学特性的影响
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Journal of Wuhan University of Technology-Mater. Sci. Ed.
Journal of Wuhan University of Technology-Mater. Sci. Ed.
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