Rayabarapu Venkateswarlu, Bibhudendra Acharya, Guru Prasad Mishra
{"title":"Double π-gate AlGaN/GaN HEMT with reduced surface and buffer traps and enhanced reliability","authors":"Rayabarapu Venkateswarlu, Bibhudendra Acharya, Guru Prasad Mishra","doi":"10.1016/j.microrel.2024.115449","DOIUrl":null,"url":null,"abstract":"<div><p>A double π-gate engineering technique is proposed to analyse the device performance and enhance the reliability by reducing the surface traps and buffer traps using Silvaco TCAD simulator tool. Peak electric field due to V<sub>gs</sub>, under the gate can worse the device performance and cause memory effects. The peak electric field destructs the charge carrier density (2-DEG) in the channel, lowers the charge carrier density in the channel and results in current collapse. The peak electric field make the electrons/holes (in n-type/p-type) to get energized (hot electron) and injected into buffer region and other epi-layers by the process trapping/de-trapping. Drain current collapse (∆ I<sub>dmax</sub>) and threshold voltage shift (∆V<sub>th</sub>) occur due to trapping/de-trapping. Proposed method has T-gate which is spilt into 3-pillars referred to as double-π shaped gate structure. Results obtained from the suggested technique showed that perfect peak current in the channel and uniform electric field distribution is achieved. The dc characteristics pulsed I-V, pulsed C-V, and pulsed S-parameters are analysed to study the trapping effects.</p></div>","PeriodicalId":51131,"journal":{"name":"Microelectronics Reliability","volume":"159 ","pages":"Article 115449"},"PeriodicalIF":1.6000,"publicationDate":"2024-07-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronics Reliability","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S002627142400129X","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
A double π-gate engineering technique is proposed to analyse the device performance and enhance the reliability by reducing the surface traps and buffer traps using Silvaco TCAD simulator tool. Peak electric field due to Vgs, under the gate can worse the device performance and cause memory effects. The peak electric field destructs the charge carrier density (2-DEG) in the channel, lowers the charge carrier density in the channel and results in current collapse. The peak electric field make the electrons/holes (in n-type/p-type) to get energized (hot electron) and injected into buffer region and other epi-layers by the process trapping/de-trapping. Drain current collapse (∆ Idmax) and threshold voltage shift (∆Vth) occur due to trapping/de-trapping. Proposed method has T-gate which is spilt into 3-pillars referred to as double-π shaped gate structure. Results obtained from the suggested technique showed that perfect peak current in the channel and uniform electric field distribution is achieved. The dc characteristics pulsed I-V, pulsed C-V, and pulsed S-parameters are analysed to study the trapping effects.
期刊介绍:
Microelectronics Reliability, is dedicated to disseminating the latest research results and related information on the reliability of microelectronic devices, circuits and systems, from materials, process and manufacturing, to design, testing and operation. The coverage of the journal includes the following topics: measurement, understanding and analysis; evaluation and prediction; modelling and simulation; methodologies and mitigation. Papers which combine reliability with other important areas of microelectronics engineering, such as design, fabrication, integration, testing, and field operation will also be welcome, and practical papers reporting case studies in the field and specific application domains are particularly encouraged.
Most accepted papers will be published as Research Papers, describing significant advances and completed work. Papers reviewing important developing topics of general interest may be accepted for publication as Review Papers. Urgent communications of a more preliminary nature and short reports on completed practical work of current interest may be considered for publication as Research Notes. All contributions are subject to peer review by leading experts in the field.