Steffen Bickel, S. Quednau, O. Birlem, Andreas Graff, Frank Altmann, Manuela Junghähnel, Juliana Panchenko
{"title":"Fine-Pitch Copper Nanowire Interconnects for 2.5/3D System Integration","authors":"Steffen Bickel, S. Quednau, O. Birlem, Andreas Graff, Frank Altmann, Manuela Junghähnel, Juliana Panchenko","doi":"10.1007/s11664-024-11107-8","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":506265,"journal":{"name":"Journal of Electronic Materials","volume":"50 4","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Electronic Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s11664-024-11107-8","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}