Thermal management and switching performance of β-Ga2O3 vertical FinFET with diamond-gate structure

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2024-05-13 DOI:10.1088/1361-6641/ad4abf

Yehong Li, Xuefeng Zheng, Fang Zhang, Yunlong He, Zijian Yuan, Xinyang Wang, Yingzhe Wang, Xiaohua Ma, Yue Hao

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Abstract

In this paper, a beta-phase gallium oxide (β-Ga2O3) vertical FinFET with diamond-gate has been studied by Silvaco-ATLAS simulation. The diamond-gate structure achieves adjustable pin (p-insulator-n) junction owing to the diamond-SiO2-Ga2O3 heterostructure. This design also enhances heat dissipation by virtue of the high thermal conductivity of the diamond. Compared to conventional FinFETs, the diamond-gate FinFET (DG-FinFET) reduces the static operating temperature rise by around 17.30%. Additionally, due to its greater heat dissipation capacity, DG-FinFETs provide an 5.84% increase in current density at 1 kA/cm2 current density level. The structural changes in the diamond-gate also result in a significant reduction in the gate-source capacitance (CGS). At 1 MHz operating frequency and the same gate voltage, DG-FinFETs have 69.29% less gate-source charge (QGS), 70.80% less charge/discharge delay time, 73.70% less switching loss, and 57.15% less conduction loss. Overall, the simulation and analysis presented in this work indicate a promising advancement of the DG-FinFET structure in high-power and rapid switching applications.

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采用钻石栅结构的 β-Ga2O3 垂直 FinFET 的热管理和开关性能

本文通过 Silvaco-ATLAS 仿真研究了一种具有金刚石栅极的β相氧化镓（β-Ga2O3）垂直 FinFET。由于采用了金刚石-二氧化硅-氧化镓异质结构，金刚石栅结构实现了可调引脚（p-绝缘体-n）结。这种设计还能利用金刚石的高导热性提高散热效果。与传统的 FinFET 相比，金刚石栅极 FinFET（DG-FinFET）的静态工作温升降低了约 17.30%。此外，由于散热能力更强，DG-FinFET 在 1 kA/cm2 电流密度水平下的电流密度提高了 5.84%。菱形栅极的结构变化还显著降低了栅源电容（CGS）。在 1 MHz 工作频率和相同栅极电压下，DG-FinFET 的栅源电荷 (QGS) 减少了 69.29%，充放电延迟时间减少了 70.80%，开关损耗减少了 73.70%，传导损耗减少了 57.15%。总之，本研究中的仿真和分析表明，DG-FinFET 结构在大功率和快速开关应用中的发展前景广阔。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.