Improvement of instrumentation consistency using DUV filter in Spectroscopic Ellipsometry

IF 1.4 4区物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

Solid-state Electronics Pub Date : 2024-04-03 DOI:10.1016/j.sse.2024.108912

Yu-Seong Gim, Yong-Woo Jung, Jong-Seok Yi, Kang-Won Lee

引用次数: 0

Abstract

In the process of mass-production of semiconductors, it has been continuously required to determine whether the process is normal or not, and for this, it must be premised that the measurement equipment can produce reliable and consistent measurement data. However, Due to the denaturation of Working Reference Material (WRM), which is the basis for judging the accuracy and precision of the equipment, it is difficult to maintain the consistency of the instrument. In this study, the effect of preventing WRM denaturation was analyzed through optical path control in Spectroscopic Ellipsometry (SE) equipment. Therefore, by applying it to actual equipment, It is suggested methods to improve measurement equipment reliability.

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在光谱椭偏仪中使用 DUV 滤波器提高仪器一致性

在半导体的大规模生产过程中，一直需要判断生产过程是否正常，而这必须以测量设备能够提供可靠、一致的测量数据为前提。然而，由于作为判断设备准确度和精确度基础的工作标准物质（WRM）会发生变性，因此很难保持仪器的一致性。本研究通过光谱椭偏仪（SE）设备中的光路控制，分析了防止 WRM 变性的效果。因此，通过将其应用于实际设备，提出了提高测量设备可靠性的方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Solid-state Electronics 物理-工程：电子与电气

CiteScore

3.00

自引率

5.90%

发文量

212

审稿时长

3 months

期刊介绍： It is the aim of this journal to bring together in one publication outstanding papers reporting new and original work in the following areas: (1) applications of solid-state physics and technology to electronics and optoelectronics, including theory and device design; (2) optical, electrical, morphological characterization techniques and parameter extraction of devices; (3) fabrication of semiconductor devices, and also device-related materials growth, measurement and evaluation; (4) the physics and modeling of submicron and nanoscale microelectronic and optoelectronic devices, including processing, measurement, and performance evaluation; (5) applications of numerical methods to the modeling and simulation of solid-state devices and processes; and (6) nanoscale electronic and optoelectronic devices, photovoltaics, sensors, and MEMS based on semiconductor and alternative electronic materials; (7) synthesis and electrooptical properties of materials for novel devices.