Doris K. T. Ng, Weiguo Chen, Linfang Xu, Harmony J. E. Lau, Landobasa Y. M. Tobing, Chong Pei Ho, Wing-Wai Chung, N. Jaafar, Hanfeng Fu, Qingxin Zhang
{"title":"SF6 mixed in N2 gas sensing responses from CMOS-compatible AlN and ScAlN pyroelectric detectors","authors":"Doris K. T. Ng, Weiguo Chen, Linfang Xu, Harmony J. E. Lau, Landobasa Y. M. Tobing, Chong Pei Ho, Wing-Wai Chung, N. Jaafar, Hanfeng Fu, Qingxin Zhang","doi":"10.1117/12.3002138","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517784,"journal":{"name":"MOEMS and Miniaturized Systems XXIII","volume":"4 6","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"MOEMS and Miniaturized Systems XXIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3002138","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}